Vue d'ensemble
G茅nie chimique : Description of the plasma state and parameters, plasma generation methods, and of the related process control and instrumentation. Electrical breakdown in gases and a series of discharge models are covered. Plasma processing applications such as PVD, PECVD, plasma polymerisation and etching, environmental applications, nanoparticle synthesis, spraying and sterilization are treated.
Terms: Automne 2009
Instructors: Coulombe, Sylvain (Fall)
- (3-1-5)
- Prerequisites: CHEE 220 and CHEE 314 or equivalent.